Maluf, Nadim Williams, Kirt <br/><br/>
An introduction to microelectromechanical systems engineering:mem mems 

 - 2ND 
 - LONDON  ARTECH HOUSE  2004 
 - XX,282P 
<br/><br/><label>ISBN: </label>1-58053-590-9 
<br/><br/><label>Subjects--Topical Terms: </label><br/>MICROELECTROMECHANICAL SYSTEMS ELECTROMECHANICAL SYSTEMS.MEM
<br/><br/><label>Dewey Class. No.: </label>621.381 MAL