Glocker, David.A , Shah, Ismat.S <br/><br/>
Handbook of thin film process technology , vol-2 

 - LONDON  INSTITUTE OF PHYSICS  1995 
<br/><br/><label>ISBN: </label>0750305983 
<br/><br/><label>Subjects--Topical Terms: </label><br/>THIN FILM PROCESS TECHNOLOGY
<br/><br/><label>Dewey Class. No.: </label>621.38152 HAN