Wasa, Kiyotaka , Kitabatake, Makoto , Adachi, Hideaki <br/><br/>
Thin film materials technology , sputtering of compound materials 

 - JAPAN  SPRINGER  2004 
 - XIV, 518P 
<br/><br/><label>ISBN: </label>0815514832 
<br/><br/><label>Subjects--Topical Terms: </label><br/>THIN FILM MATERIALS TECHNOLOGY
<br/><br/><label>Dewey Class. No.: </label>621.38152 WAS