00463nam a22001577a 4500003000500000005001700005008004100022020001500063040000600078082001800084100005800102245007000160260002600230300001400256650003500270CEME20210628203127.0210201b        xxu||||| |||| 00| 0 eng d  a0815514832  c.  a621.38152 WAS  aWasa, Kiyotaka , Kitabatake, Makoto , Adachi, Hideaki  aThin film materials technology , sputtering of compound materials  aJAPANbSPRINGERc2004  aXIV, 518P  aTHIN FILM MATERIALS TECHNOLOGY