TY  - BOOK
AU  - Wasa, Kiyotaka , Kitabatake, Makoto , Adachi, Hideaki
TI  - Thin film materials technology , sputtering of compound materials
SN  - 0815514832
U1  - 621.38152 WAS 
PY  - 2004///
CY  - JAPAN
PB  - SPRINGER
KW  - THIN FILM MATERIALS TECHNOLOGY
ER  -