TY  - BOOK
AU  - Machlin, E.S
TI  - Materials science in microelectronics , the relationships between thin film processing and structure
SN  - 008044640X
U1  - 621.38152 MAC 
PY  - 2005///
CY  - BOSTON
PB  - ELSEVIER
KW  - MATERIALS SCIENCE IN MICROELECTRONICS
ER  -