TY  - BOOK
AU  - Mohamed Gad-El-Hak, Gad-El-Hak , Mohamed
TI  - The mems handbook, mems design and fabrication
SN  - 0-8493-9138-5
U1  - 621.381 MEM 
PY  - 2006///
CY  - NEW YORK
PB  - TAYLOR AND FRANCIS
KW  - MICROELECTROMECHANICAL SYSTEMS.MICROELECTROMECHANICAL SYSTEMS-DESIGN AND CONSTRUCTION.MICROFABRICATION
ER  -