Mohamed Gad-El-Hak, Gad-El-Hak, Mohamed The mems handbook, mems applications - NEW YORK TAYLOR AND FRANCIS 2006 - XIV,890P ISBN: 0-8493-9139-3 Subjects--Topical Terms: MICROELECTROMECHANICAL SYSTEMS.DETECTORS.MICROACTUATORS.ROBOTS Dewey Class. No.: 621.381 MEM