Mohamed Gad-El-Hak, Gad-El-Hak, Mohamed <br/><br/>
The mems handbook, mems applications 

 - NEW YORK  TAYLOR AND FRANCIS  2006 
 - XIV,890P 
<br/><br/><label>ISBN: </label>0-8493-9139-3 
<br/><br/><label>Subjects--Topical Terms: </label><br/>MICROELECTROMECHANICAL SYSTEMS.DETECTORS.MICROACTUATORS.ROBOTS
<br/><br/><label>Dewey Class. No.: </label>621.381 MEM