TY  - BOOK
AU  - Mohamed Gad-El-Hak, Gad-El-Hak, Mohamed
TI  - The mems handbook, mems applications
SN  - 0-8493-9139-3
U1  - 621.381 MEM 
PY  - 2006///
CY  - NEW YORK
PB  - TAYLOR AND FRANCIS
KW  - MICROELECTROMECHANICAL SYSTEMS.DETECTORS.MICROACTUATORS.ROBOTS
ER  -