TY  - BOOK
AU  - Hsu, Tai Ran
TI  - Mems and microsystems , design and manufacture
SN  - 007048709X
U1  - 621.381 HSU 
PY  - 2002///
CY  - NEW DELHI
PB  - TATA MCGRAW HILL
KW  - MEMS AND MICROSYSTEMS. MICROELECTRONICS.MICROELECTRONIC  PACKAGING ., MICROELECTROMECHANICAL SYSTEMS
ER  -