TY  - BOOK
AU  - Madou, Marc
TI  - Fundamentals of microfabrication
SN  - 0-8493-9451-1
U1  - 621.38152 MAD 
PY  - 2002///
CY  - NEW YORK
PB  - CRC PRESS
KW  - MICROELECTRONIC PACKAGING.LASER-INDUSTRIAL APPLICATION
ER  -