Senturia , Stephen.D <br/><br/>
Microsystem design 

 - BOSTON  KLUWAR ACADEMIC  2001 
 - XXVI,689P 
<br/><br/><label>ISBN: </label>0-7923-7246-8 
<br/><br/><label>Subjects--Topical Terms: </label><br/>MICELECTRONICS. SYSTEM DESIGN. MICROELECTROMECHANICAL SYSTEMS-DESIGN AND CONSTRUCTION
<br/><br/><label>Dewey Class. No.: </label>621.381 SEN