TY  - BOOK
AU  - Senturia , Stephen.D
TI  - Microsystem design
SN  - 0-7923-7246-8
U1  - 621.381 SEN 
PY  - 2001///
CY  - BOSTON
PB  - KLUWAR ACADEMIC
KW  - MICELECTRONICS. SYSTEM DESIGN. MICROELECTROMECHANICAL SYSTEMS-DESIGN AND CONSTRUCTION
ER  -