TY  - BOOK
AU  - Gilleo, Ken
TI  - Mems moems packaging
SN  - 0-07145556-6
U1  - 621.381046 GIL 
PY  - 2005///
CY  - USA
PB  - MCGRAW HILL
KW  - MICROELECTRONIC PACKAGING. MICROELECTROMECHANICAL SYSTEMS.OPTOELECTRONIC DEVICES.MEMS.MOEMS
ER  -