TY  - BOOK
AU  - Madou, Marc.J
TI  - Fundamentals of microfabricaiton and nanotechnology, solid - state physics, fluidics, and analytical techniques in micro and nanotechnology
SN  - 9781420055115
U1  - 620.5 MAD 
PY  - 2012///
CY  - INDIA
PB  - CRC PRESS
KW  - MICROELECTROMECHANICAL SYSTEMS.NANOELECTROMECHANICAL SYSTEMS
ER  -