00359nam a22001457a 4500003000500000005001700005008004100022020001500063040000900078082001600087100001800103245005100121260002700172300001400199CEME20210628204033.0210105b        xxu||||| |||| 00| 0 eng d  a0444516166  cceme  a621.381 BAO  aBao, Minibang  aAnalysis and design principles of mems devices  aBOSTONbELSEVIERc2005  aXII, 312P