00336nam a22001337a 4500 978-0-470-08301-7 621.381 TAI RAN HSU 69350 MEMS AND MICROSYSTEMS DESIGN MANUFACTURE AND NANOSCALE ENGINEERING 2ND USA JOHN WILEY 2008 xxv,550p BK 576677 576677 0 0 0 0 NFIC CEME CEME 2019-10-30 0 621.381 HSU CEME-45990 2021-06-28 2021-06-28 BK