TY - BOOK AU - Azka Asif AU - Supervison Dr.Muhammad Mubasher Saleem TI - TH-SOF-1717-Development of Microstructure for Mechanical Fatigue Testing of Thin Film Silicon used for Fabrication of MEMS Inertial Sensors U1 - 200 THE PY - 2019/// CY - Islamabad PB - NUST College of EME KW - MS-MTS-17 MSTHESIS ER -