May, Gary S:Sze, Simon M <br/><br/>
Fundamentals of semiconductor fabrication 

 - NEW DELHI  JOHN WILEY & SONS  2004 
 - XIII,305P 
<br/><br/><label>ISBN: </label>9812-53-072-X 
<br/><br/><label>Subjects--Topical Terms: </label><br/>SEMICONDUCTOR FABRICATION
<br/><br/><label>Dewey Class. No.: </label>621.38152 MAY