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  <titleInfo>
    <title>Electrical characterization of silicon insulater materials and devices</title>
  </titleInfo>
  <name type="personal">
    <namePart>Li, Sheng S Cristoloveanu, Sorin</namePart>
    <role>
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    <place>
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    <publisher>KLUWER</publisher>
    <dateIssued>1995</dateIssued>
    <issuance>monographic</issuance>
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  <language>
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    <extent>381P</extent>
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  <subject>
    <topic>SEMICONDUCTORS ELECTRIC PROPERTIES SILICON INSULATER TECHNOLOGY SEMICONDUCTOR DESIGN AND CONSTRUCTION</topic>
  </subject>
  <classification authority="ddc">621.38152 CRI'E</classification>
  <identifier type="isbn">0-7923-9548-4</identifier>
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