TY - BOOK AU - Li, Sheng S Cristoloveanu, Sorin TI - Electrical characterization of silicon insulater materials and devices SN - 0-7923-9548-4 U1 - 621.38152 CRI'E PY - 1995/// CY - BOSTON PB - KLUWER KW - SEMICONDUCTORS ELECTRIC PROPERTIES SILICON INSULATER TECHNOLOGY SEMICONDUCTOR DESIGN AND CONSTRUCTION ER -