TY  - BOOK
AU  - ELLICOT, D. J
TI  - INTEGRATED CIRCUITS FABRICATION TECHNOLOGY
SN  - 0-07--19238-3
U1  - 621.38173 ELL'P 
PY  - 1982///
CY  - NEWYORK
PB  - MCGRAW HILL
KW  - INTEGRATED CIRCUITS DESIGN AND CONSTRUCTION
ER  -