Williams, Kirt Maluf, Nadim <br/><br/>
An introduction to microelectromechanical systems engineering:mem mem 

 - BOSTON  ARTECH HOUSE  2000 
 - 265P 
<br/><br/><label>ISBN: </label>0-89006-581-0 
<br/><br/><label>Subjects--Topical Terms: </label><br/>MICROELECTROMECHANICAL SYSTEMS ELECTROMECHANICAL SYSTEMS.MEM
<br/><br/><label>Dewey Class. No.: </label>621.381 MAL