TY  - BOOK
AU  - Williams, Kirt Maluf, Nadim
TI  - An introduction to microelectromechanical systems engineering:mem mem
SN  - 0-89006-581-0
U1  - 621.381 MAL 
PY  - 2000///
CY  - BOSTON
PB  - ARTECH HOUSE
KW  - MICROELECTROMECHANICAL SYSTEMS ELECTROMECHANICAL SYSTEMS.MEM
ER  -