Muhammad Ahmad Raza Tahir <br/><br/>
TH-SOF-1852-Design of Capacitive Micro-Electro-Mechanical-Systems (MEMS) Accelerometer, Considering Residual Stress, Temperature Variations and Thermoelastic Damping 

 - ISLAMABAD:  NUST COLLEGE OF EME,  2021. 
<br/><br/><label>Subjects--Topical Terms: </label><br/>MS-MTS-18 
<br/><br/><label>Dewey Class. No.: </label>200 THE