TH-SOF-1852-Design of Capacitive Micro-Electro-Mechanical-Systems (MEMS) Accelerometer, Considering Residual Stress, Temperature Variations and Thermoelastic Damping - Muhammad Ahmad Raza Tahir; Supervisor Dr. Muhammad Mubasher Saleem (ISLAMABAD: NUST COLLEGE OF EME, 2021)
Keywords: MS-MTS-18