Alvi, Parvej Ahmad  <br/><br/>
MEMS Pressure Sensors;   Fabrication and Process Optimization 

 - Spain;  International Frequency Sensor Association Publishing (IFSA),   2012. 
<br/><br/><label>ISBN: </label>9788461622078 
<br/><br/><label>Subjects--Topical Terms: </label><br/>MEMS Pressure Sensors.
<br/><br/><label>Dewey Class. No.: </label>621.381 ALV