TY  - BOOK
AU  - Alvi, Parvej Ahmad 
TI  - MEMS Pressure Sensors; : Fabrication and Process Optimization
SN  - 9788461622078
U1  - 621.381 ALV 
PY  - 2012///
CY  - Spain
PB  - International Frequency Sensor Association Publishing (IFSA), 
KW  - MEMS Pressure Sensors
ER  -