Hsu, Tai-Ran  <br/><br/>
MEMS and Microsystems;  Design and Manufacture 

 - New Dehli;  McGraw-Hill,   2006. 
<br/><br/><label>ISBN: </label>9780070487093 
<br/><br/><label>Subjects--Topical Terms: </label><br/>MEMS and Microsystems-Design and Manufacture
<br/><br/><label>Dewey Class. No.: </label>621.381 HSU