TY  - BOOK
AU  - Hsu, Tai-Ran 
TI  - MEMS and Microsystems: Design and Manufacture
SN  - 9780070487093
U1  - 621.381 HSU 
PY  - 2006///
CY  - New Dehli
PB  - McGraw-Hill, 
KW  - MEMS and Microsystems-Design and Manufacture
ER  -