Madou,. J Marc <br/><br/>
Fundamentals of Microfabrication and Nanotechnology 

 - 3rd Edition 
 - USA:  CRC Press Taylor and Francis Group,  2012. 
<br/><br/><label>ISBN: </label>9781420055160 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Fundamentals of Microfabrication and Nanotechnology
<br/><br/><label>Dewey Class. No.: </label>620.5  / MAD