TY  - BOOK
AU  - Madou,. J Marc
TI  - Fundamentals of Microfabrication and Nanotechnology
SN  - 9781420055160
U1  - 620.5 
PY  - 2012///
CY  - USA
PB  - CRC Press Taylor and Francis Group
KW  - Fundamentals of Microfabrication and Nanotechnology
ER  -