Sze, S. M., 1936-

Semiconductor devices, physics and technology / S.M. Sze, M.K. Lee. - 3rd ed. - Hoboken, N.J. : Wiley, 2012. - ix, 578 p. : ill. ; 27 cm.

"Semiconductor Devices: Physics and Technology, Third Edition is an introduction to the physical principles of modern semiconductor devices and their advanced fabrication technology. It begins with a brief historical review of major devices and key technologies and is then divided into three sections: semiconductor material properties, physics of semiconductor devices and processing technology to fabricate these semiconductor devices"--

9780470537947 (hardback)

2011014262


Semiconductors.--EE, EL

TK7871.85 / .S9883 2012

621.38152 SZE