Semiconductor devices, physics and technology /
S.M. Sze, M.K. Lee.
- 3rd ed.
- Hoboken, N.J. : Wiley, 2012.
- ix, 578 p. : ill. ; 27 cm.
"Semiconductor Devices: Physics and Technology, Third Edition is an introduction to the physical principles of modern semiconductor devices and their advanced fabrication technology. It begins with a brief historical review of major devices and key technologies and is then divided into three sections: semiconductor material properties, physics of semiconductor devices and processing technology to fabricate these semiconductor devices"--