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  <titleInfo>
    <title>Semiconductor devices, physics and technology</title>
  </titleInfo>
  <name type="personal">
    <namePart>Sze, S. M.</namePart>
    <namePart type="date">1936-</namePart>
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    <place>
      <placeTerm type="text">Hoboken,  N.J</placeTerm>
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    <publisher>Wiley</publisher>
    <dateIssued>2012</dateIssued>
    <edition>3rd ed.</edition>
    <issuance>monographic</issuance>
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  <language>
    <languageTerm authority="iso639-2b" type="code">eng</languageTerm>
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  <physicalDescription>
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    <extent>ix, 578 p. : ill. ; 27 cm.</extent>
  </physicalDescription>
  <abstract>"Semiconductor Devices: Physics and Technology, Third Edition is an introduction to the physical principles of modern semiconductor devices and their advanced fabrication technology. It begins with a brief historical review of major devices and key technologies and is then divided into three sections: semiconductor material properties, physics of semiconductor devices and processing technology to fabricate these semiconductor devices"--</abstract>
  <note type="statement of responsibility">S.M. Sze, M.K. Lee.</note>
  <subject authority="lcsh">
    <topic>Semiconductors</topic>
    <topic>EE, EL</topic>
  </subject>
  <classification authority="lcc">TK7871.85 .S9883 2012</classification>
  <classification authority="ddc" edition="22">621.38152 SZE</classification>
  <classification authority="bisacsh">TEC008090</classification>
  <identifier type="isbn">9780470537947 (hardback)</identifier>
  <identifier type="lccn">2011014262</identifier>
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