@book{62572,
	author = {Van Zant, Peter,},
	title = {Microchip fabrication : a practical guide to semiconductor processing /},
	publisher = {McGraw-Hill Professional, },
	year = {c2014},
	address = {New York : },
	edition = {Sixth edition.},
	url = {http://www.amazon.com/Microchip-Fabrication-Sixth-Semiconductor-Processing/dp/0071821015/ref=sr_1_1?s=books&ie=UTF8&qid=1426057650&sr=1-1&keywords=9780071821018}
}