@book{7997,
	author = {Lyshevski, Sergey Edward.},
	title = {Nano-and micro-electromechanical systems: fundamentals of nano- and microengineering },
	publisher = {CRC Press,},
	year = {2005},
	address = {Boca Raton, Fla. :},
	edition = {2nd ed.}
}