Lyshevski, Sergey Edward. <br/><br/>
Nano-and micro-electromechanical systems: fundamentals of nano- and microengineering   fundamentals of nano- and microengineering  
Sergey Edward Lyshevski. 
 - 2nd ed. 
 - Boca Raton, Fla. :  CRC Press,  2005 
 - 722 s.  ill. 
 - Nano- and microscience, engineering, technology, and medicine series ;  8 .
<br/><br/><label>ISBN: </label>0-8493-2838-1 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectromechanical systems.<br/>Nanotechnology.<br/>Mikroelektronik<br/>Nanoteknik<br/>Nanotechnology<br/>Microelectronics
<br/><br/><label>Dewey Class. No.: </label>621.381