00783 a2200229 4500 0-8493-2838-1 DLC DLC 621.381 Lyshevski, Sergey Edward. Nano-and micro-electromechanical systems: fundamentals of nano- and microengineering fundamentals of nano- and microengineering Sergey Edward Lyshevski. 2nd ed. Boca Raton, Fla. : CRC Press, 2005 722 s. ill. Nano- and microscience, engineering, technology, and medicine series ; 8 Microelectromechanical systems. Nanotechnology. Mikroelektronik Nanoteknik Nanotechnology Microelectronics BK 621.381 LYS ddc 7997 7997 0 0 0 0 NFIC CL CL GEN 2007-01-22 New Public Book 5832.90 1 621.381 LYS SEECS008016 2026-05-29 2026-04-29 2026-04-29 2017-01-05 BK