Nano-and micro-electromechanical systems: fundamentals of nano- and microengineering
fundamentals of nano- and microengineering
Lyshevski, Sergey Edward.
creator
Boca Raton, Fla
CRC Press
2005
2nd ed.
722 s. ill.
Sergey Edward Lyshevski.
Microelectromechanical systems
Nanotechnology
Mikroelektronik
Nanoteknik
Nanotechnology
Microelectronics
621.381
Nano- and microscience, engineering, technology, and medicine series ; 8
0-8493-2838-1
DLC
DLC