TY  - GEN
AU  - Lyshevski,Sergey Edward
TI  - Nano-and micro-electromechanical systems: fundamentals of nano- and microengineering : fundamentals of nano- and microengineering 
SN  - 0-8493-2838-1
U1  - 621.381 
PY  - 2005///
CY  - Boca Raton, Fla.
PB  - CRC Press
KW  - Microelectromechanical systems
KW  - Nanotechnology
KW  - Mikroelektronik
KW  - Nanoteknik
KW  - Microelectronics
ER  -