TY  - GEN
AU  - Sze, S. M.
AU  - Sze,S.M.
TI  - VLSI technology
SN  - 0-07-100347-9
U1  - 621.38173 
PY  - 1988///
CY  - New York
PB  - McGraw-Hill
KW  - Integrated circuits
KW  - Very large scale integration
KW  - Integrerade kretsar
KW  - VLSI
KW  - Mycket storskalig integration
ER  -