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Mems pressure sensors: fabrication and technologic process optimization

by Parvej Ahmad Alvi.

Material type: Text Text; Format: print ; Literary form: Not fiction Publisher: SPAIN IFSA 2012Availability: Items available for loan: College of Electrical & Mechanical Engineering (CEME)Call number: 621.381 ALV (1).
MEMS Pressure Sensors; Fabrication and Process Optimization

by Alvi, Parvej Ahmad.

Material type: Text Text Publisher: Spain; International Frequency Sensor Association Publishing (IFSA), 2012Availability: Items available for loan: College of Electrical & Mechanical Engineering (CEME)Call number: 621.381 ALV (1).
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