MEMS mechanical sensors / Stephen Beeby ... [et al.].
Series: Microelectromechanical systems series: Publisher: Boston : Artech House, c2004Description: x, 269 p. : ill. ; 26 cmISBN: 1580535364Subject(s): Detectors | Microelectromechanical systemsDDC classification: 681.2,BEE Online resources: Table of contents only
Contents:
Introduction (Page-1), Materials and fabrication techniques(Page-7), MEMS simulation and design tools (Page-39), Mechanical sensor packaging (Page-57), Mechanical transduction techniques (Page-85), Pressure sensors (Page-113), Force and torque sensors (Page-153), Inertial sensors (Page-173), Flow sensors (Page-213).
| Item type | Current location | Home library | Shelving location | Call number | URL | Status | Notes | Date due | Barcode | Item holds |
|---|---|---|---|---|---|---|---|---|---|---|
Reference
|
Military College of Signals (MCS) | Military College of Signals (MCS) | Reference | 681.2,BEE (Browse shelf) | Link to resource | Not for loan | Almirah No.24, Shelf No.6 | MCS31047 |
Total holds: 0
Introduction (Page-1), Materials and fabrication techniques(Page-7), MEMS simulation and design tools (Page-39), Mechanical sensor packaging (Page-57), Mechanical transduction techniques (Page-85), Pressure sensors (Page-113), Force and torque sensors (Page-153), Inertial sensors (Page-173), Flow sensors (Page-213).
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