Emerging technologies for in situ processing / edited by Daniel J. Ehrlich and Van Tran Nguyen.
Series: NATO ASI series. no. 139Series EPublisher: Dordrecht ; Boston : Norwell, MA, USA : M. Nijhoff ; Distributors for the U.S. and Canada, Kluwer Academic Publishers, 1988Description: x, 290 p. : ill. ; 25 cmISBN: 9024737338Subject(s): Integrated circuits -- Very large scale integration -- Design and construction -- CongressesDDC classification: 621.395,EME
Contents:
In-Situ processing combining MBE (Page-1), Motivations and early demonstration for In-Situ processing (Page-13), Laser eching and microelectronic applications (Page-23), Laser induced chemical processing of materials (Page-33), High technology manufacturing (Page-45), Ultra high vaccum processing (Page-55), Expitaxial growth of III-V materials (Page-61), Ion lithgraphy projection (Page-113), Direct writing of silicon conductors (Page-265), Subject index (Page-289).
| Item type | Current location | Home library | Shelving location | Call number | URL | Status | Notes | Date due | Barcode | Item holds |
|---|---|---|---|---|---|---|---|---|---|---|
Book
|
Military College of Signals (MCS) | Military College of Signals (MCS) | General Stacks | 621.395,EME (Browse shelf) | Link to resource | Available | Almirah No.74, Shelf No.5 | MCS679 |
Total holds: 0
In-Situ processing combining MBE (Page-1), Motivations and early demonstration for In-Situ processing (Page-13), Laser eching and microelectronic applications (Page-23), Laser induced chemical processing of materials (Page-33), High technology manufacturing (Page-45), Ultra high vaccum processing (Page-55), Expitaxial growth of III-V materials (Page-61), Ion lithgraphy projection (Page-113), Direct writing of silicon conductors (Page-265), Subject index (Page-289).
There are no comments on this title.