Introduction to microfabrication / Sami Franssila.
Material type:
TextPublisher: Chichester, West Sussex, England ; Hoboken, NJ : J. Wiley, c2004Description: xvii, 401 p. : ill. ; 26 cmISBN: 0470851058 (cloth); 0470851066 (pbk.)Subject(s): Microelectromechanical systems | Electronic apparatus and appliances | MicrofabricationDDC classification: 621.3 LOC classification: TK7875 | .F73 2004Online resources: Publisher description | Table of contents
| Item type | Current location | Home library | Shelving location | Call number | Status | Date due | Barcode | Item holds |
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Book
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College of Electrical & Mechanical Engineering (CEME) | College of Electrical & Mechanical Engineering (CEME) | General Stacks | 621.3 FRA (Browse shelf) | Available | CEME-40124 | ||
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Book
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College of Electrical & Mechanical Engineering (CEME) | College of Electrical & Mechanical Engineering (CEME) | General Stacks | 621.3 FRA (Browse shelf) | Available | CEME-40773 |
Total holds: 0
Includes bibliographical references and index.
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