MEMS materials and processes handbook / Reza Ghodssi, Pinyen Lin, editors.
Material type:
TextSeries: MEMS reference shelf: Publisher: New York ; London : Springer, c2011Description: xxxv, 1187 p. : ill. ; 24 cmISBN: 9780387473161 (hbk.)Subject(s): Microelectromechanical systems -- Materials | Microelectromechanical systemsDDC classification: 621.381 LOC classification: TJ163 | .M46 2011| Item type | Current location | Home library | Shelving location | Call number | Status | Date due | Barcode | Item holds |
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Book
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School of Mechanical & Manufacturing Engineering (SMME) | School of Mechanical & Manufacturing Engineering (SMME) | General Stacks | 621.381 MEM (Browse shelf) | Available | SMME-1983 |
Includes bibliographical references and index.
The MEMS design process -- Additive processes for semiconductors and dielectric materials -- Additive processes for metals -- Additive processes for polymeric materials -- Additive processes for piezoelectric materials : piezoelectric MEMS -- Materials and processes in shape memory alloy -- Dry etching for micromachining applications -- MEMS wet-etch processes and procedures -- MEMS lithography and micromachining techniques -- Doping processes for MEMS -- Wafer bonding -- MEMS packaging materials -- Surface treatment and planarization -- MEMS process integration.
Hardcover
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