Design and manufacturing of active microsystems / Stephanus Büttgenbach, Arne Burisch, Jürgen Hesselbach, editors.
Material type:
TextSeries: Microtechnology and MEMSPublisher: Heidelberg, [Germany] : Springer, c2011ISBN: 9783642129025Subject(s): Microelectronics | Microelectromechanical systemsDDC classification: 658.5752 LOC classification: TK7874 | .D4744 2011TK7875Online resources: Full text available from SpringerLink ebooks - Chemistry and Materials Science (2011) SpringerLink ebooks - Chemistry and Materials Science (2011)
| Item type | Current location | Home library | Shelving location | Call number | Status | Date due | Barcode | Item holds |
|---|---|---|---|---|---|---|---|---|
Book
|
School of Mechanical & Manufacturing Engineering (SMME) | School of Mechanical & Manufacturing Engineering (SMME) | General Stacks | 658.5752 DES (Browse shelf) | Available | SMME-1929 |
Total holds: 0
Includes bibliographical references and index.
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