000 00750cam a22002414a 4500
020 _a9780849391392
040 _aDLC
_cDLC
_dDLC
082 0 0 _a621.381
_222
245 0 0 _aMEMS : applications
_c Mohamed Gad-el-Hak.
250 _a2nd ed.
260 _aBoca Raton, FL :
_bCRC Press/Taylor & Francis,
_c2006.
300 _a1 v. (various pagings) :
_bill. ;
_c26 cm.
490 1 _aMechanical engineering series
490 0 _aThe MEMS handbook
504 _aIncludes bibliographical references and index.
650 0 _aMicroelectromechanical systems.
650 0 _aDetectors.
650 0 _aMicroactuators.
650 0 _aRobots.
700 1 _aGad-el-Hak, Mohamed,
830 0 _aMechanical engineering series (Boca Raton, Fla.)
942 _2ddc
_cBK
999 _c11429
_d11429