| 000 | 00750cam a22002414a 4500 | ||
|---|---|---|---|
| 020 | _a9780849391392 | ||
| 040 |
_aDLC _cDLC _dDLC |
||
| 082 | 0 | 0 |
_a621.381 _222 |
| 245 | 0 | 0 |
_aMEMS : applications _c Mohamed Gad-el-Hak. |
| 250 | _a2nd ed. | ||
| 260 |
_aBoca Raton, FL : _bCRC Press/Taylor & Francis, _c2006. |
||
| 300 |
_a1 v. (various pagings) : _bill. ; _c26 cm. |
||
| 490 | 1 | _aMechanical engineering series | |
| 490 | 0 | _aThe MEMS handbook | |
| 504 | _aIncludes bibliographical references and index. | ||
| 650 | 0 | _aMicroelectromechanical systems. | |
| 650 | 0 | _aDetectors. | |
| 650 | 0 | _aMicroactuators. | |
| 650 | 0 | _aRobots. | |
| 700 | 1 | _aGad-el-Hak, Mohamed, | |
| 830 | 0 | _aMechanical engineering series (Boca Raton, Fla.) | |
| 942 |
_2ddc _cBK |
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| 999 |
_c11429 _d11429 |
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