000 00377nam a22001457a 4500
020 _a9780521897716
082 _a621.381 LUC
100 _aLucyszyn, S.
245 _aAdvanced RF MEMS
260 _aNew York
_bCambridge University Press
_c2010
300 _axx, 412p. :
_e22 cm
650 _aRadio frequency microelectromechanical systems
700 _aS Lucyszyn
942 _cBK
999 _c11668
_d11668