000			00406nam a22001577a 4500
020			_a9788131764756
082			_a621.381
100			_aLiu, Chang,
245			_aFoundations of MEMS
250			_a2nd ed.
260			_aNew Delhi _bPearson _c2011
300			_a576 p. _bill. ; _e24 cm.
500			_aIncludes bibliographical references and index.
650			_aMicroelectromechanical systems.
942			_cBK
999			_c12075 _d12075